| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for selecting a polycrystalline silicon suitable for raw material for manufacturing a single crystalline silicon with high quantitativity and reproducibility, contributing to stable manufacturing of a single crystalline silicon.SOLUTION: When a disc-shaped sample 20 taken from a polycrystalline silicon rod is evaluated, peaks emerge in a &phgr; scan chart in some cases. The fewer the number of the peaks and the narrower the half width thereof, the more suitable the rod is for use as a raw material for manufacturing a single crystalline silicon. The number of peaks emerging in a &phgr; scan chart is preferably 24/cmor less, in terms of the number of peaks per unit area of the disc-shaped sample, for both of the Miller index planes <111> and <220>. With Rrepresenting the radius of the disc-shaped sample, a value obtained by multiplying the peak half width by δL=2&pgr;R/360 is defined as the heterogeneous crystal particle diameter. It is preferred to select a rod having a heterogeneous crystal particle diameter less than 0.5 mm for both of the planes for use as a raw material for manufacturing a single crystalline silicon. |
