Planar Structure For A Triaxial Gyrometer

摘要

An inertial sensor for measuring information relating to rotation in three orthogonal axes, comprising a support and a vibrating sensitive element secured to the support; said sensitive element having a deformable frame and at least two deformable projections which extend in a plane (X-Y); wherein the inertial sensor extends in the same plane; the deformable frame and said at least two deformable projections have a plane of symmetry parallel to the plane; said at least two projections are rectilinear beams which have an approximately square cross section, are not collinear and are preferably approximately orthogonal to one another; each of said deformable beams being connected by only one end to the deformable frame at a location at which the amplitude of the primary vibration mode is at a maximum; and in that said sensor has a device for detecting each of the secondary vibration modes.