| 摘要 |
A waveguide including a first cladding layer, the first cladding layer having an index of refraction, n3; an assist layer, the assist layer having an index of refraction, n2, and the assist layer including ASixOy, wherein A is selected from: Ta, Ti, Nb, Hf, Zr, and Y, x is from about 0.5 to about 2.0, y is from about 3.5 to about 6.5, and the atomic ratio of A/A+Si in ASixOy is from about 0.2 to about 0.7; and a core layer, the core layer including a material having an index of refraction, n1, wherein n1 is greater than n2 and n3, and n2 is greater than n3.
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