| 摘要 |
PROBLEM TO BE SOLVED: To achieve reduction in costs of a substrate stage device.SOLUTION: A substrate stage device 20 includes: a second step guide 54 that extends in an X-axis direction and is movable in the X-axis and in a Y-axis direction; and a fine movement stage 30 that is provided on the second step guide 54, is movable in the X-axis direction along the second step guide 54 and is movable in the Y-axis direction together with the second step guide 54. The second step guide 54 is aligned at a position of the X-axis direction in accordance with a position of the fine movement stage 30 in the X-axis direction. Therefore, a dimension in the X-axis direction of the second step guide 54 can be set to be shorter than a movable distance of the fine movement stage 30 with respect to the X-axis direction, and thus, reduction in costs of the substrate stage device 20 can be achieved. |
