发明名称 DIAPHRAGM DEVICE, OPTICAL SYSTEM AND EXPOSURE DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a technique advantageous in reducing operating noise of a diaphragm device.SOLUTION: In a diaphragm device that restricts the opening of an optical system by a plurality of light-blocking blades overlapping each other, the light-blocking blade 2-A includes a linear contact part 15-A provided with a face that contacts a member adjacent to the light-blocking blade 2-A.
申请公布号 JP2013217984(A) 申请公布日期 2013.10.24
申请号 JP20120085894 申请日期 2012.04.04
申请人 CANON INC 发明人 KAWAHARA NOBUMICHI
分类号 G03B9/02;G03B9/06 主分类号 G03B9/02
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