| 摘要 |
A specimen substrate (2) is supported on a microscope stage (21) of an inverted optical microscope, and a specimen (1) and a solution (4) are held on the specimen substrate (2). An AFM is provided with a cantilever chip (3) and an XYZ scanner (6). The cantilever chip (3) is provided with a cantilever supported to a substrate and a probe provided at a free end of the cantilever. A cantilever chip holder (7) holds the cantilever chip (3) with the probe facing the specimen substrate (2) and the substrate inclined with respect to the specimen substrate (2), and a Z scanner (8) and an XY scanner (9) three-dimensionally scan the cantilever chip (3) over the specimen substrate (2). An illumination light source (32) illuminates the specimen (1) through a space between the substrate of the cantilever chip (3) and the specimen substrate (2). |
