| 发明名称 |
Coil and Method of Manufacturing a Coil |
| 摘要 |
A method for manufacturing an electronic device and an electronic device are disclosed. In an embodiment the method comprises forming an opening in an isolation layer, isotropically etching the opening thereby forming an extended opening with curved sidewalls, and forming a conductive material in the opening. |
| 申请公布号 |
US2013277797(A1) |
申请公布日期 |
2013.10.24 |
| 申请号 |
US201213452669 |
申请日期 |
2012.04.20 |
| 申请人 |
MENATH MARKUS;FISCHER THOMAS;WENDT HERMANN;INFINEON TECHNOLOGIES AG |
发明人 |
MENATH MARKUS;FISCHER THOMAS;WENDT HERMANN |
| 分类号 |
H01L21/76;H01L27/04 |
主分类号 |
H01L21/76 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
