DEVICE AND METHOD FOR HOLDING SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To stably hold a substrate.SOLUTION: A substrate holding device according to an embodiment includes a first suction holding part and a second suction holding part. The first suction holding part sucks and holds a substrate in a non-contact state by jetting a fluid to generate a negative pressure between the substrate and the first suction holding part. The second suction holding part sucks and holds the substrate using a force generated between the substrate and the second suction holding part by applying a voltage.