SURFACE TREATMENT METHOD FOR DIAMOND-LIKE CARBON LAYER AND COATED ARTICLE MANUFACTURED BY THE METHOD

摘要

A surface treatment method for diamond-like carbon layer include at least the following steps: a substrate is provided; a diamond-like carbon layer is formed on the substrate by ion beam assisted magnetron sputtering deposition; fluorine ions and silicone ions is doped in the diamond-like carbon layer at a temperature of about 400� C. to about 600� C. A coated article manufactured by the method is also provided.