| 摘要 |
<p>The present invention is a liquid treatment device for treating a substrate held in a substrate-holding unit by supplying a treatment fluid containing a polymer material from a nozzle to said substrate, the liquid treatment device having: a supply channel for supplying the treatment fluid to the nozzle; a filter for removing minute foreign matter from the treatment fluid, and positioned in the supply channel; and a grounded conductive member positioned so as to contact the treatment fluid on the downstream side of the filter in the supply channel, in order to remove the electricity from the polymer charged by passage through the filter. Furthermore, the present invention makes it possible to suppress the generation of minute foreign matter which is caused by the charging of the polymer.</p> |
