METHOD AND DEVICE FOR TESTING A SUBSTRATE

摘要

A method for testing a substrate, comprising: positioning a substrate (S10); performing optical scanning of the substrate to determine whether the substrate has a defect; if a defect exists, then determining the location of same (S20); obtaining size images of the measurement points of the substrate and transmitting same (S30); calculating the width of lines on the substrate and simultaneously obtaining images of the defect location (S40). The present invention also provides a corresponding device for testing a substrate.