| 摘要 |
PROBLEM TO BE SOLVED: To provide a capacitive sensor capable of suppressing reduction in detection accuracy while suppressing damage.SOLUTION: A capacitive sensor 1 provided with a semiconductor substrate 4 has a space part S formed by bonding a first fixed plate 2 to one surface 4a of the semiconductor substrate 4 and bonding a second fixed plate 3 to the other surface 4b of the semiconductor substrate 4. The space part S is filled with gas. At least either one electrode 5a or 6a out of movable electrodes 5a and 6a and fixed electrodes 21a, 21b, 22a, and 22b is provided with a stopper 51 or 61 where a recessed part 51a or 61a opening at the side of the other electrode 21a, 21b, 22a, or 22b is formed. |
