发明名称 CARRIER DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a carrier device capable of suppressing the deterioration of conveyance efficiency when a carriage is moved between two tracks.SOLUTION: A carrier device 1 includes: a track portion 4 for running a carriage 3; a track portion 5 apart from the track portion 4, for running the carriage 3; a moving track portion 6A hoisting between a position A1, which is connected to the track portion 4 and apart from the track portion 5, and a position A2, which is connected to the track portion 5 and apart from the track portion 4, for running the carriage; and a moving track portion 6B hoisting between a position B1, which is connected to the track portion 4 and apart from the track portion 5, and a position B2, which is connected to the track portion 5 and apart from the track portion 4, for running the carriage.
申请公布号 JP2013219282(A) 申请公布日期 2013.10.24
申请号 JP20120090407 申请日期 2012.04.11
申请人 MURATA MACH LTD 发明人 SUZUKI TAKASHI
分类号 H01L21/677 主分类号 H01L21/677
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