| 摘要 |
PROBLEM TO BE SOLVED: To provide a laser beam machining apparatus that prevents a risk in which a machining head is broken by the disturbance of a liquid column.SOLUTION: A laser beam machining apparatus includes: a holding means for holding a workpiece; and a laser beam emitting means comprising at least a laser oscillator and a machining head and emitting a laser beam onto the workpiece held with the holding means. The machining head is provided with: a condensing lens for condensing a laser beam oscillated from the laser oscillator; a liquid jetting means for forming a liquid column into which the laser beam condensed with the condensing lens is guided by jetting the liquid onto the workpiece; a pipe through which the liquid column formed by the liquid jetting means passes; a gas inflow path which makes the gas, for rectifying the liquid column by surrounding the liquid column, flow into the pipe; and a means for detecting the abnormality of the liquid column for detecting the abnormality of the gas, which flows in the gas inflow path, as the abnormality of the liquid column. |
