| 摘要 |
PROBLEM TO BE SOLVED: To provide an electronic device capable of reducing problems such as an operation failure, variations of device properties, by preventing contact between a sealing part covering a storage space and an MEMS structure, in the electronic device with the storage space for storing the MEMS structure.SOLUTION: An electronic device 10 includes a semiconductor substrate 12, an insulating layer 16 where an MEMS structure 20 laminated on the semiconductor substrate 12 is disposed, a storage space 18 where the MEMS structure 20 is stored, and a sealing layer 34 covering the storage space 18. The electronic device 10 also includes a reinforcement layer 40 disposed above the sealing layer 34, and a wiring layer 38 conductively connected with an electrode pad 30 formed on the insulating layer 16, wherein the reinforcement layer 40 and the wiring layer 38 are formed with the same material. |
