| 摘要 |
PROBLEM TO BE SOLVED: To measure a surface position of a measurement target with high accuracy.SOLUTION: A measuring device for measuring a surface position of a measurement target includes: a detector that outputs an interference signal by detecting interference light of measurement light reflected at the measurement target with reference light reflected at a reference surface; and a processing part that calculates the surface position according to a sine signal and a cosine signal having a phase corresponding to an optical path length difference between the measurement light and the reference light obtainable from the interference signal output from the detector. The processing part includes a correction processing part that corrects the sine signal and the cosine signal so as to reduce noise components included in the sine signal and the cosine signal. |
