发明名称 COMPOSITION, METHOD OF MANUFACTURING COMPOSITE BODY, AND METHOD OF MANUFACTURING OPTICAL MEMBER
摘要 PROBLEM TO BE SOLVED: To provide a method of manufacturing a composite body, in less number of steps, which includes a substrate and a photo-curing layer, with less coloring, and having light resistance, by optical imprint lithography.SOLUTION: A method of manufacturing a composite body consisting of a substrate and a photo-curing layer by an optical imprint lithography, with the use of a mold in which a rough pattern is formed and also with the use of a substrate which is substantially transparent against visible light, with transmissivity of light of respective wavelengths over the entire region of a wavelength region less than 370 nm being 10% or less, includes a step in which, on the substrate or the mold, a photo-curing composition layer is formed which contains liquid photo-curing composition that contains a compound having at least one photopolymerizable group and a photoinitiator which acts as a polymerization initiator of the compound having the photopolymerizable group by being exposed to the light of wavelength region of 370 nm or longer and has such a characteristic as a structure changes to reduce absorbing intensity in visible light region, a step in which the photo-curing composition layer is sandwiched between the substrate and the mold, a step in which the photo-curing composition layer which is being sandwiched between the substrate and the mold is exposed to the light containing the wavelength region of 370 nm or longer from the substrate side to form a photo-curing layer, and a step in which the mold is released from the photo-curing layer.
申请公布号 JP2013219366(A) 申请公布日期 2013.10.24
申请号 JP20130104459 申请日期 2013.05.16
申请人 TOYO GOSEI KOGYO KK 发明人 SAKAI NOBUSHI;OSACHI TAKESHI
分类号 H01L21/027;B29C59/02;G02B5/02 主分类号 H01L21/027
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