发明名称 PRESSURE SENSOR AND ELECTRONIC APPARATUS
摘要 PROBLEM TO BE SOLVED: To provide a pressure sensor capable of improving reliability and an electronic apparatus equipped with the pressure sensor.SOLUTION: A pressure sensor 1 comprises: a double tuning fork element 10 having a vibration beam part 13, a pair of base parts 14 connected to both ends of the vibration beam part 13 and terminal electrodes 15a and 15b provided on the pair of base part 14; and diaphragm 20 having a flexible part 21 having flexibility, a pair of support parts 22 which are provided protruding from one of principal surfaces 21a of the flexible part 21 and to which the base parts 14 of the double tuning fork element 10 are fixed and electrode pads 24a and 24b which are provided on the pair of support parts 22. The terminal electrodes 15a and 15b and electrode pads 24a and 24b are connected with each other by a metal wire 41.
申请公布号 JP2013217719(A) 申请公布日期 2013.10.24
申请号 JP20120087121 申请日期 2012.04.06
申请人 SEIKO EPSON CORP 发明人 SAKURAI TOSHINOBU
分类号 G01L9/00;G01L9/08 主分类号 G01L9/00
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