发明名称 FRONT OPENING WAFER CONTAINER WITH DOOR DEFLECTION MINIMIZATION
摘要 A front opening wafer container suitable for 450 mm diameter wafers. The front door has a pair of latch mechanism externally operable on the sides of the door, each latching mechanism having a pair of latch tips extendible from top and bottom peripheries of the door into receivers in the door frame of the front opening of the container portion. The door contains wafer cushions that support horizontally stacked wafers. The cushions have vertically extending support strip regions with arcuate wafer engagement portions therebetween. The arcuate wafer engagement portion is positioned in a vertically extending central recess on the inside surface of the door. The wafer cushion is secured to the inside of the door at the pair of vertically extending support strip portions at a pair of vertically extending loading junctures. The latching tips of each latching mechanism is in a vertical alignment with the vertically extending loading junctures.
申请公布号 US2013277268(A1) 申请公布日期 2013.10.24
申请号 US201113880944 申请日期 2011.10.19
申请人 FULLLER MATTHEW A.;ENTEGRIS, INC. 发明人 FULLLER MATTHEW A.
分类号 H01L21/677 主分类号 H01L21/677
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