ACCOMMODATING CONTAINER, SHUTTER OPENING AND CLOSING UNIT FOR ACCOMMODATING CONTAINER, AND WAFER STOCKER USING SAME

摘要

Provided is a wafer stocker in which external atmosphere inflow can be prevented, a prescribed atmosphere can be maintained in a way for accommodating space with a comparatively small amount of a gas, and in which it is possible to prevent dust and grit from adhering to the surfaces of wafers. Shutter parts formed from a plurality of shielding plates having a height dimension the same as the spacing of shelves disposed within an accommodating container are disposed with a minute gap opened with a main body part. By supplying a clean gas to the inside of the accommodating container, a clean atmosphere with higher pressure than the outside environment is maintained, and also the shutter part is opened and closed by moving the shielding plates up and down independently of the shelves that support wafers.