INERTIAL FORCE SENSOR

摘要

The inertial force sensor according to the present invention is provided with: fixed parts; beam parts that are connected to the fixed parts; spindle parts that are connected to the other ends of the beam parts and are displaced by an inertial force while causing the beam parts to deform; conductive parts that are provided to the spindle parts; strain-sensitive resistors that are provided to the beam parts in order to detect deformation of the beam parts; first and second fault diagnosis electrodes that are provided to the fixed parts; first fault diagnosis wiring for connecting the first fault diagnosis electrode and a conductive part via a beam part; and second fault diagnosis wiring for connecting the second fault diagnosis electrode and a conductive part via a beam part. This inertial force sensor has high reliability, and does not continue to output an erroneous output signal when a crack occurs in the spindle parts.