| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for controlling an adaptive optical system to be an appropriate state in a lapse time when a state of an object to be inspected as an imaging target is changed, and to control the adaptive optical system so that the imaging can be performed soon after the state of the object to be inspected is restored, thereby enabling to promptly take a high quality image.SOLUTION: An imaging method for taking an image of an object to be inspected by irradiating the object to be inspected with measuring light, in which an aberration generated in the object to be inspected is corrected by an aberration correction unit, the imaging method repeatedly performs the aberration measurement step of measuring an amount of the aberration generated in the object to be inspected, the aberration correction step of correcting the aberration by controlling the aberration correction unit in accordance with the measured aberration amount, and the storing step of storing, in the storage unit, the control state of the aberration correction unit in association with the corresponding aberration amount. The aberration correction unit is controlled in a predetermined control state stored in the storage unit. |
