| 摘要 |
PROBLEM TO BE SOLVED: To provide a spectrometer of wide wavelength coverage using a plurality of non-uniformly arrayed groove diffraction gratings.SOLUTION: The spectrometer uses three kinds of non-uniformly arrayed groove concave diffraction gratings Gto G, Gresponsible for an energy range from 50 to 200 eV, Gresponsible for an energy range from 155 to 350 eV, and Gresponsible for an energy range from 300 to 2200 eV. The diffraction conditions of Gto Gare satisfied in respective wavelength ranges. Incident angles αto α, αof Gto Gmeasured from the normal directions of the gratings are set to be α<α<αin order to achieve high output and high resolution of Gto Gat the respective wavelength ranges. The normal directions of all gratings are set to be common and then, center locations, &Dgr;to &Dgr;of Gto Gare set to be &Dgr;1<&Dgr;2<&Dgr;3 in the normal direction in order to satisfy α<α<α. The spectrometer has wide wavelength coverage by selecting a proper diffraction grading from Gto G. |
