发明名称 |
SEMICONDUCTOR DEVICE MANUFACTURING METHOD, SEMICONDUCTOR DEVICE, OPTICAL PRINT HEAD USING THE SAME AND IMAGE FORMATION APPARATUS |
摘要 |
PROBLEM TO BE SOLVED: To achieve downsizing and reduction in material cost.SOLUTION: A semiconductor device manufacturing method comprises: a process of forming a peeling layer 124 on a first semiconductor substrate 120; a process of forming semiconductor films 140b on the peeling layer 124; a process of forming a trench 131 which makes a width Wof the semiconductor films 140b be 300 μm or less and has a depth to expose the peeling layer 124; a process of etching the peeling layer 124 to remove the peeling layer 124; a process of transferring and bonding the semiconductor films 140b on a second semiconductor substrate; and a process of forming on the second semiconductor substrate, individual wiring layers each composed of a conductive thin film so as to include on the semiconductor films. |
申请公布号 |
JP2013219374(A) |
申请公布日期 |
2013.10.24 |
申请号 |
JP20130111180 |
申请日期 |
2013.05.27 |
申请人 |
OKI DATA CORP;OKI DIGITAL IMAGING CORP |
发明人 |
OGIWARA MITSUHIKO;FUJIWARA HIROYUKI;SAKUTA MASAAKI;ABIKO ICHIMATSU |
分类号 |
H01L33/62;B41J2/44;B41J2/45;B41J2/455;G03G15/04;H01L27/15;H01L33/08;H01L33/20;H01L33/30;H01L33/44;H04N1/036 |
主分类号 |
H01L33/62 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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