| 摘要 |
PROBLEM TO BE SOLVED: To provide a high output micro focus X-ray generator by increasing the X-ray generation efficiency.SOLUTION: In a transmission type micro focus X-ray generator for generating X-ray by irradiating a target with electrons discharged from an electron source via an electron passage, the electron passage is formed as a cone having an opening enlarged from the outlet on the target side toward an inlet on the electron source side. Material of the target is any one of Mo, Ta, W, and the atomic number of the material of an electron reflector is equal to or larger than that of target material. |
