| 摘要 |
PROBLEM TO BE SOLVED: To provide a geometric quantity measuring apparatus capable of executing measurement of geometric quantity of an object to be measured with higher efficiency.SOLUTION: A geometric quantity measuring apparatus which measures flatness of a work includes: a sensor head 9 having three distance sensors 9a-9c which are arranged in an X axis direction at distance Db to each, and three distance sensors 9c-9e which are arranged in a Y axis direction at distance Da to each; an actuator for table movement, which moves the sensor head 9 in the X axis direction relative to the work; and an actuator for right and left feed of a grindstone head, which moves the sensor head 9 in the Y axis direction relative to the work. |
