| 摘要 |
PROBLEM TO BE SOLVED: To provide a graphite film that is thin, has flexibility, and is excellent in thermal diffusion property, used as a heat dissipating member in electronic equipment, precision equipment, and which has not been achieved hitherto because it is difficult to cause a thin graphite film to foam.SOLUTION: By finding that it is important (1) to confine an outgas that causes foaming in the final stage of graphitization to the inside of a film and (2) to suppress the action of metal impurities that impede foaming, a flexible thin film graphite having a thickness of 21 μm or less can be obtained by directly laminating two or more raw material films and subjecting the laminate to heat processing at temperature of 2,600°C or more. |
