发明名称 |
CHAMBER APPARATUS AND METHOD OF MAINTAINING TARGET SUPPLY UNIT |
摘要 |
A chamber apparatus used with a laser apparatus may include: a chamber provided with at least one inlet for introducing thereinto a laser beam outputted from the laser apparatus; a target supply unit provided to the chamber for supplying a target material to a predetermined region in the chamber; a recovery control unit for instructing the target supply unit to execute recovery operation if a predetermined condition is met; a recovery unit for executing the recovery operation in response to the instruction from the recovery control unit; and a position measuring unit for measuring a position of the target material supplied from the target supply unit into the chamber.
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申请公布号 |
US2013277452(A1) |
申请公布日期 |
2013.10.24 |
申请号 |
US201313925727 |
申请日期 |
2013.06.24 |
申请人 |
GIGAPHOTON INC. |
发明人 |
YABU TAKAYUKI;KAKIZAKI KOUJI;WATANABE YUKIO;WAKABAYASHI OSAMU |
分类号 |
G03F7/20 |
主分类号 |
G03F7/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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