| 摘要 |
System and method for identification of foreign object debris, FOD, in a sample, based on comparison of edge features identified in images of the sample takes at a reference point in time and at a later time (when FOD may be already present). The rate of success of identification of the FOD is increased by compensation for relative movement between the imaging camera and the sample, which may include not only processing the sample's image by eroding of imaging data but also preceding spatial widening of edge features that may be indicative of FOD. |
