发明名称 SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device with sufficiently low off-state current.SOLUTION: An oxide semiconductor material in which holes have a larger effective mass than electrons is used. A transistor includes on a substrate: a gate electrode layer; a gate insulating layer; an oxide semiconductor layer having heavy holes whose effective mass is 5 or more times, preferably 10 or more times, further preferably 20 or more times the effective mass of electrons; a source electrode layer in contact with the oxide semiconductor layer; and a drain electrode layer in contact with the oxide semiconductor layer.
申请公布号 JP2013219327(A) 申请公布日期 2013.10.24
申请号 JP20130016789 申请日期 2013.01.31
申请人 SEMICONDUCTOR ENERGY LAB CO LTD 发明人 YAMAZAKI SHUNPEI;KATO KIYOSHI;MURAKAMI MASAKAZU
分类号 H01L29/786;C01G15/00;H01L21/336;H01L21/8242;H01L21/8247;H01L27/105;H01L27/108;H01L27/115;H01L29/788;H01L29/792 主分类号 H01L29/786
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