发明名称 |
SEMICONDUCTOR DEVICE |
摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor device with sufficiently low off-state current.SOLUTION: An oxide semiconductor material in which holes have a larger effective mass than electrons is used. A transistor includes on a substrate: a gate electrode layer; a gate insulating layer; an oxide semiconductor layer having heavy holes whose effective mass is 5 or more times, preferably 10 or more times, further preferably 20 or more times the effective mass of electrons; a source electrode layer in contact with the oxide semiconductor layer; and a drain electrode layer in contact with the oxide semiconductor layer. |
申请公布号 |
JP2013219327(A) |
申请公布日期 |
2013.10.24 |
申请号 |
JP20130016789 |
申请日期 |
2013.01.31 |
申请人 |
SEMICONDUCTOR ENERGY LAB CO LTD |
发明人 |
YAMAZAKI SHUNPEI;KATO KIYOSHI;MURAKAMI MASAKAZU |
分类号 |
H01L29/786;C01G15/00;H01L21/336;H01L21/8242;H01L21/8247;H01L27/105;H01L27/108;H01L27/115;H01L29/788;H01L29/792 |
主分类号 |
H01L29/786 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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