| 摘要 |
PROBLEM TO BE SOLVED: To provide a method employing a charged-particle microscope for acquiring depth-resolved imagery of a sample without having to adjust the landing energy of imaging beams.SOLUTION: The method comprises: detecting, separately for each energy value, electrons emitted from a sample upon beam irradiation; recording an output Oof a detector as a function of kinetic energy Eof the electrons; and deconvolving a measurement set M={(O, E)} with a computer, to spatially resolve it into a result set R={(V, L)}. |
