| 摘要 |
PROBLEM TO BE SOLVED: To obtain a photoelectric conversion device manufacturing method which can manufacture a photoelectric conversion device excellent in photoelectric conversion properties without increasing the number of processes.SOLUTION: A photoelectric conversion device manufacturing method comprises: a first laser patterning process of partially removing a power generation layer 3 on a transparent conductive layer 2 by laser to expose the transparent conductive layer 2; a second laser patterning process of partially removing the power generation layer 3 on the transparent conductive layer 2 and a back reflection electrode layer 4 by laser to expose the transparent conductive layer 2; and a third laser patterning process of removing the transparent conductive layer 2, the power generation layer 3 and the back reflection electrode layer 4 at a peripheral part of a translucent substrate 1 by laser to expose the peripheral part of the translucent substrate 1. The photoelectric conversion device manufacturing method comprises a step of supplying a process solution 6 having a property of inactivating defects in material which forms the power generation layer 3 to a processed part by laser to remove a residue generated by the laser processing in any of the first laser patterning process, the second laser patterning process and the third laser patterning process. |
