| 摘要 |
PROBLEM TO BE SOLVED: To provide a vibration detector which improves the sensitivity of the vibration detector such as a flesh conduction microphone and also improves the productivity.SOLUTION: In a vibration detector, a vibration detection element (4) having a diaphragm (4a) on an upper surface is housed in a case body (3) having an opening (2a) at an upper part thereof. In the vibration detector, a sealed air chamber (7) is formed at an upper part of the diaphragm (4a) and a vibration detection film (6) is provided at the upper part of the air chamber (7). Further, the vibration detection film (6) does not contact with the diaphragm (4a). The structure reduces the mass of a vibration system to improve the sensitivity compared to conventional products. Further, a polymer elastomer liquid is not used in the manufacturing. Thus, the hardening time of the polymer elastomer liquid is omitted to improve the productivity. |
