发明名称 |
Method for permanently connecting two metal surfaces |
摘要 |
The method involves processing metal surfaces of two respective substrates by production of adjacent-surface layers with defects. The adjacent-surface layers are produced by implanting ions of gas and/or deposition of an inferior metal layer and/or application of metallic nanoparticles. A permanent, electrically conductive connection is produced predominantly by substitution diffusion between metal ions and/or metal atoms of the metal surfaces during a connection of the metal surfaces. The metal surfaces are oriented and connected at maximum process temperature of 300 degree Celsius. |
申请公布号 |
EP2654075(A2) |
申请公布日期 |
2013.10.23 |
申请号 |
EP20130175456 |
申请日期 |
2010.03.31 |
申请人 |
EV GROUP E. THALLNER GMBH |
发明人 |
WIMPLINGER, MARKUS;DRAGOI, VIOREL |
分类号 |
H01L21/60;H01L23/00;H01L25/00;H01L25/065 |
主分类号 |
H01L21/60 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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