| 发明名称 |
On chip integrated inductor and manufacturing method therefor |
| 摘要 |
<p>A semiconductor chip has an integrated inductor, manufactured during back end of line processing. In particular, a loop (30) is formed in a metallization layer and a central region (32) of magnetic material is provided within the loop. The size of the central region is controlled to achieve the desired properties.</p> |
| 申请公布号 |
EP2337063(B1) |
申请公布日期 |
2013.10.23 |
| 申请号 |
EP20090179745 |
申请日期 |
2009.12.17 |
| 申请人 |
NXP B.V. |
发明人 |
GOLUBOVIC, DUSAN;FOTOPOULOU, KORINA |
| 分类号 |
H01L49/02;H01F17/00;H01F41/04;H01L21/02;H01L23/522;H01L23/64 |
主分类号 |
H01L49/02 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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