Integrated piezoelectric sensor for static pressure measurement
摘要
<p>A sensor includes a film bulk acoustic wave resonator (FBAR) (145) integrated with a transistor (105). The FBAR and transistor are configured to determine pressure in the reference cavity (170) by measuring a current flow through the transistor.</p>
申请公布号
EP2653844(A1)
申请公布日期
2013.10.23
申请号
EP20120164632
申请日期
2012.04.18
申请人
HONEYWELL INTERNATIONAL INC.
发明人
COSTEA, STEFAN DAN;DUMITRU, VIOREL GEORGEL;AVRAMESCU, VIOREL;GOLOGANU, MIHAI
