CMP SLURRY REGENERATION APPARATUS AND METHOD

摘要

PURPOSE: A CMP slurry regeneration apparatus and a method thereof are provided to save the regeneration cost of a CMP slurry by recovering low concentration metal ions from a hydroxide in a regeneration CMP slurry. CONSTITUTION: A solid sinks to the bottom of a gravity separation container (205). A concentration slurry container (207) accommodates the solid as a concentration slurry. A solid-liquid separation device (209) cleans a CMP slurry. The solid-liquid separation device cleans the component of the CMP slurry to collect the component. A small amount of metal ion is regenerated from the component after the cleaning process in a regeneration slurry container (211). [Reference numerals] (AA) Waste solution; (BB) Recycling slurry