| 摘要 |
PURPOSE: An electron detector is provided to increase amount of a detected electron by applying voltage to a voltage applying part and forming an electron and an electric potential difference. CONSTITUTION: A wafer part (120) collects an electron. A voltage applying part (130) forms an electron and an electric potential difference. The voltage applying part induces the electron. An insulation part (140) is formed along the circumference of the wafer part. The insulation part is positioned between the wafer part and the voltage applying part. |
