发明名称 A SYSTEM FOR ANALYSING PLASMA
摘要 <p>A system for analysing plasma. The system comprises at least one sensor which is co-operable with a plasma source for providing an analog signal representative of a characteristic of plasma from the plasma source, and a sound card installed on a computing means in communication with the sensor for converting the analog signal into a digital signal for facilitating digital processing thereof.</p>
申请公布号 EP2283511(B1) 申请公布日期 2013.10.23
申请号 EP20090742137 申请日期 2009.05.07
申请人 DUBLIN CITY UNIVERSITY 发明人 MCNALLY, PATRICK;LAW, VICTOR, JOHN;DANIELS, STEPHEN
分类号 H01J37/32 主分类号 H01J37/32
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