| 摘要 |
The objective of the present invention is to provide a liquid supply device with which it is possible to quickly and precisely adjust the amount of a liquid supplied from various liquid supply units to a liquid supply port. This liquid supply device supplies a liquid to a common liquid supply location from multiple liquid supply units connected in parallel, and is equipped with a supply amount detection means that detects the amount of liquid supplied to a liquid supply port from each liquid supply unit, and a flow volume adjustment means that adjusts the amount of liquid supplied from each liquid supply unit. The liquid supply device has a normal operational control whereby liquid is supplied from each liquid supply unit to the liquid supply location, and an upper limit supply amount-setting control, which is executed before the normal operation control, whereby the upper limit liquid supply amount is set separately for each liquid supply unit. With the upper limit supply amount-setting control, the liquid is supplied in a state wherein the hypothetical supply amounts for the liquid supply units are aligned, and the actual supply amount for each liquid supply unit is detected, and the upper limit supply amount for each liquid supply unit during normal operation control is set on the basis of the actual supply amount that has been detected for each liquid supply unit. |
