摘要 |
<p>Vacuum pump (1) has flange (2), at least two gas inlets (4), at least one gas outlet, at least two rotary shafts (6) each carrying rotating pump parts (7), which are situated opposite respective stationary pump parts (8). It has a lower housing part (9), an upper housing part (10) which has the flange, and drive means which make the rotary shafts rotate. All the gas inlets are inside the flange and the flange is located within the shared upper housing.</p> |