| 摘要 |
The invention relates to a gas mixer having at least two mass flow controllers (1, 2) which can control the gas mass flow rate of a gas line (4, 5) associated with the corresponding mass flow controller, and a control unit (3) which is connected to the mass flow controllers (1, 2) to control the gas mass flow rate through each of the gas lines (4, 5) and thereby to adjust a desired gas mixture, provision being made that each mass flow controller (1, 2) has a volume counter (16) associated therewith, and that the control unit (3) is provided with a volume signal (V) for each gas line (4, 5) The invention further relates to a method of controlling a gas mixer, in which, on the basis of a target value for the mixing ratio, a target value for the gas mass flow rate is predefined for a plurality of mass flow controllers (1, 2) which are each associated with a gas line (4, 5) through which a component of the gas mixture to be obtained flows, with the ratio of the volumes that have flowed through the mass flow controllers up to now of the gases to be mixed being taken into account in determining the target values for the gas mass flow rate.
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