发明名称 DICING/DIE-BONDING FILM AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD
摘要 The present invention provides a dicing die bond film in which yielding and breaking of the dicing film are prevented and in which the die bond film can be suitably broken with a tensile force. In the dicing die bond film of the present invention, the tensile strength of the contact part in which the outer circumference of the push-up jig contacts the dicing film at 25° C. is 15 N or more and 80 N or less and the yield point elongation is 80% or more, the tensile strength of the wafer bonding part of the dicing film at 25° C. is 10 N or more and 70 N or less and the yield point elongation is 30% or more, [(the tensile strength of the contact part)−(the tensile strength of the wafer bonding part)] is 0 N or more and 60 N or less, and the breaking elongation rate of the die bond film at 25° C. is more than 40% and 500% or less.
申请公布号 KR20130116261(A) 申请公布日期 2013.10.23
申请号 KR20137010948 申请日期 2011.09.21
申请人 NITTO DENKO CORPORATION 发明人 TANAKA SHUMPEI;MATSUMURA TAKESHI
分类号 H01L21/78;H01L21/301;H01L21/52 主分类号 H01L21/78
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