| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a sputtering target composed of a zinc oxide sintered compact in which the generation of cracking and arcing is reduced. <P>SOLUTION: The sputtering target uses a zinc oxide sintered compact in which sintered compact density is 5.3 to 5.5 g/cm<SP>3</SP>and the ratio between a Young's modulus and bending strength, E/σ is 300 to 1,500. The zinc oxide sintered compact essentially consists of ZnO, and is composed of Al<SB>2</SB>O<SB>3</SB>present on the grain boundaries and in the grains of ZnO and ZnAl<SB>2</SB>O<SB>4</SB>produced by reaction between ZnO and Al<SB>2</SB>O<SB>3</SB>and present on the grain boundaries and in the grains of ZnO. <P>COPYRIGHT: (C)2010,JPO&INPIT |
