Driver for piezoelectric manipulator

摘要

The invention relates to power conversion and shaping of electric signals; it allows efficient generation of low voltage direct current power to high voltage and high current pulses suitable for driving piezoelectric manipulators and scanners. It overcomes problems associated with energy losses in traditional high voltage amplifiers and eliminates the need of feed-through connections for operation of piezoelectric devices inside pressure sealed volumes, such as controlled gas mixture, vacuum or temperature controlled chambers. The device comprises two stage voltage boost converters and full field-effect transistor bridge with pulse width limiter, which using the internal capacitance of the piezoelectric device, generates the required voltage waveform for inertial slider operation. The device also provides means to operate said piezoelectric devices in scanning mode.