MUTIFUNCTIONAL PIEZOELECTRIC MICROMACHINED ULTRASONIC TRANSDUCER AND METHOD FOR FABRICATING THE SAME

摘要

PURPOSE: A method for manufacturing a complex micropiezoelectric ultrasonic transducer is provided to enable the reception and the transmission of ultrasonic signals by arranging a receiving unit and a transmitting unit on a single substrate, thereby forming a compact complex micropiezoelectric ultrasonic transducer. CONSTITUTION: A complex micropiezoelectric ultrasonic transducer (100) includes a substrate (110), an ultrasonic transmitter (140), and an ultrasonic receiver (130). The ultrasonic transmitter is arranged between a pair of electrodes on the substrate and generates ultrasonic signals by using a thick film piezoelectric layer. The ultrasonic receiver, which is arranged between the electrodes on the substrate to be adjacent to the ultrasonic transmitter, includes a thin film piezoelectric layer thinner than the thick film piezoelectric layer and receives the ultrasonic waves which are transmitted by the ultrasonic transmitter, reflected by an object, and returned.