ELECTRON BEAM IRRADIATOR FOR ACCURATELY CONTROLING A POSITION OF SAMPLE

摘要

PURPOSE: An electronic beam emitting device performing the fine position adjustment of a sample is provided to efficiently use an inner space by connecting a shaft manipulation member and a shaft in series with each other. CONSTITUTION: A chamber housing (121) includes an electronic beam emitting unit (130). A chamber housing opening and closing unit (125) opens and closes the chamber housing. A sample placing unit includes a placing space for a sample. A sample position adjusting unit is installed in the chamber housing opening and closing unit. The sample position adjusting unit adjusts a position of the sample placing unit.