| 摘要 |
An illumination optical system for illuminating a surface with a light beam from a light source, in a first plane parallel with the optical axis, the light beam from the light source is split, and first light source images are formed in a first zone with the use of the thus split light beams; light beams from the first light source images being led to the surface, in a second plane parallel with the optical axis and perpendicular to the first plane, the light beam from the light source is split, and second light source images are formed in a second zone, with the use of the thus split light beams, light beams from the second light source images being led to the surface, where the width of the first zone in the first plane is greater than that of the second zone in the second plane.
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