发明名称 |
Defect inspecting apparatus and defect inspecting method |
摘要 |
The defect inspecting apparatus is capable of easily performing adjustment with a change of an elevation angle of illumination to a substrate to be inspected, while being low in cost. A plane parallel plate and a cylindrical lens supported by a lens holder are symmetrically disposed at the same tilt angle theta with respect to a horizontal plane. A shift in optical axis at a focal position of light (101) with the rotation of the cylindrical lens can be prevented from occurring. The light can be rotated with a motor and a belt by a rotating mechanism, while allowing the optical axes of the light to match each other at the same focal position. The lens holder and the rotating mechanism are connected to a vertically moving mechanism and moved along a guide of the vertically moving mechanism to thereby adjust the focal position of the cylindrical lens.
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申请公布号 |
US8564767(B2) |
申请公布日期 |
2013.10.22 |
申请号 |
US201113821468 |
申请日期 |
2011.07.26 |
申请人 |
FUKUSHIMA HIDEKI;HIROSE NOBUAKI;HITACHI HIGH-TECHNOLOGIES CORPORATION |
发明人 |
FUKUSHIMA HIDEKI;HIROSE NOBUAKI |
分类号 |
G01N21/00 |
主分类号 |
G01N21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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