| 摘要 |
A piezoresistive MEMS oscillator uses an output circuit to control the voltage across the resonator body. This results in a DC bias of the resonator. A current path is provided between the output of the output circuit and the resonator body, such that changes in current through or voltage across the resonator body, resulting from changes in resistance of the resonator body, are coupled to the output. This arrangement uses the bias current flowing through the resonator to derive the output. In this way, the same DC current is used to provide the required DC resonator bias and to drive the output circuit to its DC operating point. |
